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Updated: Jun 17, 2025

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Air-coupled ultrasonic transducer based on lead-free piezoceramics prepared by digital light processing 3D printing
Xinyi Zhou1, Weigang Ma1, Huayun Gao1
1School of Materials Science and Engineering, State Key Laboratory of Material Processing and Die & Mould Technology, Huazhong University of Science and Technology, Wuhan 430074, China.
Abstract:
Piezoelectric composite ceramics, as the key components of ultrasonic transducers, have their vibration modes, electromechanical coupling performance, and acoustic impedance closely related to the volume fraction of ceramics. This study employed a novel digital light processing 3D printing technique (DLP) to fabricate 0.5Ba(Zr0.2Ti0.8)O3-0.5(Ba0.7Ca0.3)TiO3 (BCZT)-based 1-3 piezoelectric composite ceramics with different ceramic volume fractions (15.6 %, 23.5 %, 36.2 %, 48.4 %, 59.5 %). It demonstrates the suitability of the DLP process for the fabrication of 1-3 piezoelectric composite ceramics and investigates the influence of ceramic volume fraction on the performance of these ceramics. When the piezoelectric ceramic volume fraction was 59.5 %, the piezoelectric coefficient effective d33 of the 1-3 piezoelectric composite device reached 315 pC/N, demonstrating excellent piezoelectric performance. The acoustic impedance Z was 16.3 MRayl, and the thickness electromechanical coupling coefficient kt was 0.55, indicating high energy conversion efficiency. The air-coupled ultrasonic transducer prepared from the 1-3 piezoelectric composite ceramics with a ceramic volume fraction of 59.5 % exhibited a round-trip insertion loss (IL) of -70.32 dB and a -6 dB bandwidth (BW-6dB) of 7.42 %. This work provides a more convenient and new method for the preparation of lead-free piezoelectric ceramic ultrasonic transducers.

