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Updated: Jun 16, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Iterative outlier detection and refinement rule of compensation for phase aberrations in digital holographic
Abstract:
We propose a robust and accurate compensation method for phase aberrations based on the iterative outlier detection and refinement (ODR) rule. This method does not require additional steps to select the known flat region manually or by image segmentation. Based on the proposed method, the phase aberration in regions of a specimen can be detected and refined iteratively. Then, the least squares fitting can be carried out to estimate the coefficients of Zernike polynomials and obtain the accurate phase aberration finally. Computer simulations and real experiments validate the feasibility and effectiveness, and the results show that the proposed method is robust to noise and has superior accuracy even when the specimen occupies half of the field of view.

