Nanoscale Mechanical Manipulation of Ultrathin SiN Membranes Enabling Infrared Near-Field Microscopy of

Enrico Baù1, Thorsten Gölz1, Martin Benoit2

  • 1Chair in Hybrid Nanosystems and Center for NanoScience, Nano-Institute Munich, Faculty of Physics, Ludwig-Maximilians-University, Königinstr. 10, 80539, München, Germany.

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