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Characterization of plasma parameters and neutral particles in microwave and radio frequency discharges in the

D López-Rodríguez1,2, K Crombé1,2, A Goriaev1

  • 1Laboratory for Plasma Physics, École Royale Militaire/Koninklijke Militaire School, Brussels 1000, Belgium.

The Review of Scientific Instruments
|August 22, 2024
PubMed

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