Development of a Plate Linear Ultrasonic Motor Using the Power Flow Method

Linear ultrasonic motors can output large thrust stably in a narrow space. In this paper, a plate linear ultrasonic motor is studied. Firstly, the configuration and operating principle of the Π-type linear ultrasonic motor is illustrated. Then, two slotting schemes are put forward for the stator to enlarge the amplitude of the driving foot and improve the output performance of motor. After that, a novel optimization method based on the power flow method is suggested to describe the energy flow of stator, so as to estimate the slotting schemes. Finally, the prototypes are manufactured and tested. The experimental results show that the output performance of both new motors are excellent. The maximum output thrust of the arc slotted motor is 76 N/94 N, and the corresponding maximum no-load speed is 283 mm/s/213 mm/s, while the maximum output thrust of V-slotted motor reaches 90 N/120 N, and the maximum no-load speed reaches 223 mm/s/368 mm/s.