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High-Resolution Rotation-Measuring System for MEMS Ultrasonic Motors Using Tunneling Magnetoresistance Sensors.
Jiangbo He1, Qiuyue Feng1, Yu Chen2,3
1School of Mechanical Engineering, Xihua University, Chengdu 610039, China.
Micromachines
|August 29, 2024
Summary
This study introduces a novel high-resolution rotation-measuring system for MEMS ultrasonic motors using tunneling magnetoresistance (TMR) sensors. The system achieves over 0.1° resolution, demonstrating accurate rotation detection for miniaturized motors.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Sensor Technology
- Rotational Measurement
Background:
- Miniaturized MEMS ultrasonic motors require precise rotation feedback for control.
- Existing rotation-measuring systems may lack the resolution or compatibility for such small-scale applications.
Purpose of the Study:
- To develop and validate a high-resolution rotation-measuring system for MEMS ultrasonic motors.
- To utilize tunneling magnetoresistance (TMR) sensors for angle detection in this context for the first time.
Main Methods:
- Detailed architectural and principle description of the proposed system.
- Finite element simulation to optimize permanent magnet properties and TMR sensor placement.
- Experimental evaluation and calibration using a high-precision servo motor.
Main Results:
- The system exhibits a highly linear relationship between output and rotational angle.
- The measurement is immune to the rotor's out-of-plane movement.
- Achieved an angle-detecting resolution exceeding 0.1°.
Conclusions:
- The developed TMR-based system successfully measures the continuous rotation of MEMS ultrasonic motors.
- The system demonstrates high linearity, robustness, and resolution suitable for miniaturized motor applications.
