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Ning He1,2, Huiqin Hu1,2, Zhiying Cui3

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A new compact dispersive objective lens enhances spectral confocal sensors for precise displacement measurements. This innovation expands measurement range and accuracy, leading to more portable and cost-effective sensors.

Keywords:
dispersive objective lensdisplacement sensorspectral confocal sensorspectrometer

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Area of Science:

  • Optical Engineering
  • Metrology
  • Sensor Technology

Background:

  • Spectral confocal sensors utilize dispersive objective lenses for high-resolution longitudinal displacement measurements.
  • Existing dispersive lenses face limitations in dispersion range, cost, and accuracy.

Purpose of the Study:

  • To design a compact, long-axial dispersion objective lens to enhance spectral confocal sensor performance.
  • To expand the measurement range and improve the accuracy of spectral confocal sensors.

Main Methods:

  • Designed a compact objective lens with six elements, including cemented doublets.
  • Achieved a system length of 58 mm, a working distance of 46 ± 6 mm, and a 12 mm dispersion range (450-656 nm).
  • Integrated the lens into a spectral confocal measurement system for performance evaluation.

Main Results:

  • The designed lens offers an object-side numerical aperture (NA) of 0.22 and image-side NA of 0.198-0.24.
  • The spectral confocal system demonstrated a resolution of 0.15 μm.
  • A maximum linear error of ±0.7 μm was recorded, indicating high-precision measurement capabilities.

Conclusions:

  • The novel dispersive objective lens design significantly improves spectral confocal sensor accuracy and range.
  • The compact and cost-effective design facilitates the development of advanced portable sensors.
  • This advancement supports broader applications requiring precise displacement metrology.