Ultra-Low-Power, Extremely Stable, Highly Linear-Response Thermal Conductivity Sensor Based on a Suspended Device...

The continuous and stable monitoring by sensors is crucial for ensuring the safe utilization of hydrogen due to its inherent high explosiveness. Currently, catalyst aging and oxygen dependence often limit the lifetime of most sensors, which stems from the sensing materials and catalytic reaction in comparison to thermal conductivity sensors. Thermal conductivity sensors possess superior sensing characteristics such as lowpower consumption and exceptional stability attributed to their free-catalysts or free-oxygen nature. Herein, we present an ultralow-power hydrogen-thermal conductivity sensor based on suspended bare platinum nanowires. This sensor incorporates two suspended independent working elements (serpentine/bridge), each of which is thermally decoupled from the substrate. Also, the bridge element operates at significantly lower power levels (the lowest ∼3.32 μW) compared to existing direct-current hydrogen-thermal conductivity sensors. Furthermore, it demonstrates a 99.99% linearity between hydrogen concentration and response under various operating powers. Finally, our sensor shows remarkable stability through a repeatability test (>30,000 cycles). This developed platform provides an optimal structure scheme for integrated sensors with ultralow-power, extremely stable, highly linear-response sensing characteristics, which is expected to be widely used for hydrogen detection and leakage warning under various pipeline distribution systems.