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Updated: Jun 14, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Low-voltage single-atom electron microscopy with carbon-based nanomaterials

Aowen Li1, Ang Li1, Wu Zhou1

  • 1School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, China.

Micron (Oxford, England : 1993)
|August 31, 2024
PubMed

Keywords:
ADF imagingCarbon-based materialsDPC imagingEELSLow-voltagePtychographySingle-atom STEM

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