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Updated: Jun 14, 2025

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
A Voltage-Controlled Surface Acoustic Wave Oscillator Based on Lithium Niobate on Sapphire Low-Loss Acoustic Delay
Abstract:
In this work, we investigate, for the first time, a low phase noise and wide tuning range voltage-controlled surface acoustic wave oscillator (VCSO) based on a lithium niobate on sapphire (LNOS) low-loss acoustic delay line (ADL). The thin-film LN/SiO2 bilayer acoustic waveguide, together with the single-phase unidirectional transducer (SPUDT) design, is key to attaining low insertion loss (IL) by enhancing energy confinement and directionality. Based on a high-performance ADL with an IL of only 5.2 dB, a fractional bandwidth (FBW) of 5.38%, and a group delay of 110 ns, the VCSO is implemented by commercially available circuit components using a series-resonant topology. The LNOS ADL oscillator operates at 888 MHz, showcasing a low phase noise of -94.1 dBc/Hz at 1-kHz offset and a root-mean-square (rms) jitter of only 30.26 fs (integrated from 12 kHz to 20 MHz) while only consuming 16 mA of supply current. Featuring a wide frequency tuning range of 6630 ppm, the proposed VCSO is a promising low-noise, low-power, and high-frequency timing device for emerging applications.Index Terms- Acoustic delay line (ADL), jitter, lithium niobate (LN), oscillator, phase noise, surface acoustic wave (SAW), thin film.skiptabldblfloatfix.
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