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Updated: Jun 14, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
An edge-coupled magnetostatic bandpass filter
Connor Devitt1, Renyuan Wang2, Sudhanshu Tiwari3
1OxideMEMS Lab, Elmore Family School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, 47907, USA. devitt@purdue.edu.
Abstract:
The further development of 5G and 6G communication systems introduced new frequency allocations beyond 6 GHz, necessitating the development of compact bandpass filters that can operate over wide gigahertz frequency ranges. Herein, we report on the design, fabrication, and characterization of an edge-coupled magnetostatic forward volume wave bandpass filter (MSFVW). Using micromachining techniques, we fabricate both 2-pole and 4-pole filters from a yttrium iron garnet (YIG) film grown on a gadolinium gallium garnet (GGG) substrate with inductive transducers. By adjusting an out-of-plane magnetic field, we demonstrate linear center frequency tuning for a 4th-order filter from 4.5 GHz to 10.1 GHz while retaining a fractional bandwidth of 0.3%, an insertion loss of 6.94 dB, and a - 35 dB rejection level. We characterize the filter nonlinearity in the passband and stopband with IIP3 measurements of - 4.85 dBm and 25.84 dBm, respectively. In this work, we demonstrate a compact octave tunable narrowband channel-select filter with a significant degree of design flexibility and performance comparable to the state-of-the-art.
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