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Updated: Jun 14, 2025

Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates
Published on: March 20, 2015
Silver microplasma-engineered nanoassemblies on periodic nanostructures for SERS applications
Zhuo-Fu Wang1, Kai-Chun Tsai1, Wei-Hung Chiang2
1Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, 10607, Taiwan. djsam@mail.ntust.edu.tw.
Abstract:
This research aimed to enhance the performance of surface-enhanced Raman scattering (SERS) substrates through the implementation of periodic nanostructures, effectively increasing surface area and uniformity. The approach involved a two-step process: initially, magnetron sputtering was employed to minimize the Raman background signal from the polymer substrate, and subsequently, the microplasma nanoparticle coating method was utilized to augment the presence of silver nanoparticles (AgNPs) for enhancing SERS efficacy. The outcome revealed several key findings: a coefficient of variation (CV) of approximately 8% for individual substrates (3 × 3 cm2), a CV of 6% between different fabrication batches, and a sustained signal strength of 85% over a storage period exceeding two months in a moisture-proof enclosure, thus meeting commercial product standards. Moreover, the substrate demonstrated a limit of detection of 8.4 × 10-7 M (306.5 ppb) for malachite green under non-resonance Raman excitation conditions along with an impressive enhancement factor of 2.69 × 106, establishing it as a high-performance and stable SERS substrate.

