Depth-Resolved X-Ray Photoelectron Spectroscopy Evidence of Intrinsic Polar States in HfO2-Based Ferroelectrics

Megan O Hill1,2, Ji Soo Kim1, Moritz L Müller1

  • 1Department of Materials Science and Metallurgy, University of Cambridge, Cambridge, CB3 0FS, UK.

Summary

Ferroelectric hafnia-based films show size-dependent polarization linked to oxygen vacancies. This study reveals electrochemical changes during polarization switching, suggesting an indirect relationship in these advanced materials.