Microscale Humidity Sensor Based on Iron-Coated Elaters of Equisetum Spores

Humidity sensors deeply influence human manufacturing production and daily life, while researchers generally focus on developing humidity sensors with higher stability, higher linearity, rapid response time, etc. Yet, few people discuss measuring humidity in the microenvironment by miniaturizing sensor size into a microscale, in which the existing humidity sensors are difficult to reach. Accordingly, this study proposes a methodology for measuring relative humidity in the microscale by utilizing the distinctive morphologies of Equisetum spores across a range of relative humidities between 50% and 90%. Equisetum spores are responsive to changes in ambient relative humidity and remain in their original activities even after iron sputtering, which aims to endow the sensor with magnetic properties. The test performed in this study demonstrated a response time of 3.3 s and a recovery time of 3.6 s. In the first application, we employed such microscale sensors to work in the channel of the microfluidic chip or the cell migration microchip, as an example of working in the microenvironment. COMSOL Multiphysics 6.2 software was also used to simulate the change in relative humidity in such microchannels. Secondly, such microscale sensors are combined with smartphone-based microscopy to measure the humidity of the skin. These microscale sensors pave the new way to sensing humidity in microenvironments.