Compact vacuum transfer devices for highly air-sensitive materials in scanning electron microscopy

Area of Science:

• Materials Science
• Analytical Chemistry
• Surface Science

Background:

• Surface analysis of air-sensitive materials is hindered by oxidation and hygroscopicity.
• Existing methods risk sample degradation and inaccurate experimental outcomes.

Purpose of the Study:

• To develop and validate a compact vacuum transfer device (VTD) for air-sensitive samples.
• To enable reliable surface analysis using SEM and EDS without atmospheric exposure.

Main Methods:

• Designed a magnetically controlled, split-structure VTD for SEM specimen exchange chambers.
• Integrated VTD with SEM and EDS for morphology and chemical composition analysis.
• Tested VTD with highly air-sensitive samples, including metallic sodium.

Main Results:

• VTD successfully transferred metallic sodium, maintaining high atomic percentage (94.55%) after 14 minutes.
• Demonstrated airtight recycling and re-transfer capabilities for samples post-SEM/EDS.
• Confirmed device compatibility with various SEM manufacturers and stub types.

Conclusions:

• The VTD offers excellent practicality and airtightness for air-sensitive sample transfer.
• Enables accurate SEM and EDS analysis by preventing atmospheric contamination.
• Suitable for both short and long-distance transfers between laboratories.