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Equipments Used to Measure Body Temperature01:13

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Body temperature can be assessed using various devices and measured in Celsius or Fahrenheit.
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Integrated Amorphous Carbon Film Temperature Sensor with Silicon Accelerometer into MEMS Sensor.

Qi Zhang1, Xiaoya Liang1, Wenzhe Bi1

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Micromachines
|September 28, 2024
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Summary

Amorphous carbon thin films offer superior temperature sensing. Integrating these films with MEMS accelerometers creates a high-performance, economical sensor for temperature and acceleration measurement.

Keywords:
MEMSTemperature-Resistance Characteristicsamorphous carbon filmintegrated sensorsilicon accelerator

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Area of Science:

  • Materials Science
  • MEMS Technology
  • Sensor Technology

Background:

  • Amorphous carbon (a-C) exhibits excellent properties for temperature sensing applications.
  • Integrating temperature sensing with accelerometers can enhance device functionality and reduce complexity.

Purpose of the Study:

  • To develop and characterize an integrated Micro-Electro-Mechanical Systems (MEMS) sensor combining an amorphous carbon thin film temperature sensor with a silicon accelerometer.
  • To investigate the influence of deposition methods (DC sputtering vs. linear ion beam) on a-C film properties and temperature sensing performance.

Main Methods:

  • Amorphous carbon thin films were deposited using DC magnetron sputtering and linear ion beam techniques.
  • Film nanostructures were analyzed using Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM).
  • Raman spectroscopy and X-ray Photoelectron Spectroscopy (XPS) were employed to analyze carbon bonding (sp2/sp3 content) and cluster size.

Main Results:

  • DC-sputtered a-C films, with higher sp2 content, demonstrated superior temperature-sensitive properties.
  • The integrated sensor achieved a temperature sensitivity of 1.62 mV/°C (5V input) with 0.9958 linearity from 20-150 °C.
  • The accelerometer module exhibited a sensitivity of 1.4 mV/g/5V, with low nonlinearity and noise.

Conclusions:

  • Amorphous carbon thin films are highly suitable for developing advanced temperature sensors.
  • The developed integrated MEMS sensor offers a cost-effective and high-performance solution for simultaneous temperature and acceleration monitoring.
  • This research paves the way for convenient fabrication of multifunctional MEMS devices.