High-Precision Measurement of Microscales Based on Optoelectronics and Image Integration Method

Area of Science:

• Metrology
• Optoelectronics
• Image Processing

Background:

• Conventional microscale detection systems offer limited adaptability for diverse calibration requirements.
• Existing methods struggle to meet the varied calibration needs of different microscales.

Purpose of the Study:

• To develop a high-precision measurement method for microscales using integrated optoelectronic and image techniques.
• To address the limitations of single-detection systems and enable diversified calibration.

Main Methods:

• An automatic measurement and processing system integrating photoelectric signal and photoelectric image methods.
• Investigated smooth motion on linear guides and cosine error reduction for interference length measurement.
• Developed image-based line positioning with edge and center recognition algorithms.

Main Results:

• Photoelectric signal method achieved a maximum difference of 0.105 μm and standard uncertainty of 0.068 μm for a 1 mm microscale.
• Image measurement method demonstrated comparable accuracy to the photoelectric signal method.
• Both methods within the integrated system showed good consistency, with normalized errors less than 1.

Conclusions:

• The integrated optoelectronic and image measurement system provides high precision and broad adaptability for microscale calibration.
• The photoelectric signal method excels in efficiency and accuracy, while the image method offers 2D measurement capabilities.
• This combined approach overcomes limitations of individual methods, enabling versatile microscale metrology.