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Updated: Jun 10, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Line-scan phase-resolved synthetic wavelength LiDAR using an off-axis holographic approach
Abstract:
We demonstrate a novel, to our knowledge, approach for phase-resolved coherent 3D surface imaging that utilizes synthetic wavelength phase-based ranging and line-scan off-axis holography. Our proof-of-concept system employs an akinetic tunable laser to perform fast wavelength switching and a galvanometer mirror for slow-axis mechanical scanning. Quantitative depth measurements of an anodized aluminum plate and 3D-printed depth calibration targets and a printed circuit board are demonstrated. Analyses of both shot-noise limited system performance and speckle noise are also presented. The proof-of-concept system achieves micron-scale depth precision with a FOV of 12.8 mm × 34 mm and a 50 ms image acquisition time.

