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Laser-produced plasma water-window x-ray source by continuous liquid bismuth jet.
Optics Letters
|October 15, 2024
Summary
A continuous liquid bismuth jet generates a stable water-window x-ray source for 120 minutes. This breakthrough offers a promising tool for advanced extreme ultraviolet lithography and biological imaging applications.
Area of Science:
- Physics
- Materials Science
- Optics
Background:
- X-ray sources are crucial for various scientific and technological applications.
- Developing stable and efficient water-window (WW) x-ray sources remains a challenge.
- Liquid targets offer potential advantages for high-repetition-rate x-ray generation.
Purpose of the Study:
- To demonstrate a continuously operated water-window x-ray source.
- To investigate the performance of a regenerative liquid bismuth jet for x-ray generation.
- To assess the potential of this source for future applications like extreme ultraviolet lithography and biological imaging.
Main Methods:
- Utilized a regenerative liquid bismuth (Bi) jet with a diameter of 35-40 µm injected into a vacuum.
- Operated the source continuously for 120 minutes.
- Characterized the emitted photons per pulse at specific wavelengths (4.1 nm, 4.3 nm, 2.8 nm) and the overall spectral range (2.3-4.4 nm).
Main Results:
- Achieved continuous operation of the water-window x-ray source for 120 minutes.
- Measured photon flux of 3-4.2 × 10^11 photons/sr at 4.1-4.3 nm (n=4-4 transitions) and 1.7 × 10^11 photons/sr at 2.8 nm (n=4-5 transitions).
- Observed a total photon emission of 10^12-10^13 photons/(nm·sr) in the 2.3-4.4 nm range and a power law scaling of spectra with laser intensity (power of 0.4).
Conclusions:
- The regenerative liquid bismuth jet provides a stable and continuous water-window x-ray source.
- This technology shows significant potential for next-generation extreme ultraviolet lithography.
- The source is a viable candidate for advanced x-ray microscopy in biological imaging.

