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Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement

Jifeng Chu1, Zhuoli Deng1, Jianbin Pan1

  • 1State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xi'an 710049, China.

ACS Sensors
|October 16, 2024
PubMed

Keywords:
SF6 decomposition productsdrift correctiongas sensorimpedance measurementslinearity improvementparameter optimization

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