Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement.

Jifeng Chu1, Zhuoli Deng1, Jianbin Pan1

  • 1State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xi'an 710049, China.

ACS Sensors
|October 16, 2024
PubMed
Summary

This study introduces an optimized alternating current (AC) impedance method for semiconductor gas sensors, improving linearity and baseline stability. The novel approach effectively corrects temperature drift, enhancing sensor reliability for detecting gases like SF6 decomposition products.

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