Direct Growth of Bio-Graphene Using Modified-Chemical Vapor Deposition For Straight-Forward Characterization

Oil Palm Shell (OPS) is subjected to heating, resulting in gaseous compound release. These compounds are deposited on the substrate to produce Bio-Graphene. Through Chemical Vapor Deposition (CVD), the process is optimized by growing environment parameters during the production process. This process involves the controlled deposition of gaseous compounds onto a substrate under two different positions of the alumina boat (ABC-1 and ABC-2). Direct deposition on silicon wafers eliminated etching and transfer sequences, simplifying Bio-Graphene characterization. Field Emission Scanning Electron Microscope, Atomic Force Microscope, Raman Spectroscopy, X-ray diffraction, and I-V measurement were employed to characterize the Bio-Graphene. The findings revealed that the better-closed settings (ABC-2) facilitated the growth of high-quality Bio-Graphene with better crystallinity, detectable growth spurt, estimated few-layer thickness, larger growth area, and lower surface roughness. Optimizing the deposition environment at ABC-2 significantly enhances the quality and crystallinity of Bio-Graphene from OPS, paving the way for future applications.