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Updated: Jun 9, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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The Seven-State RF MEMS Miniaturized Broadband Reconfigurable Step Attenuator

Yuheng Si1,2,3,4, Siming Chen5, Peifang Fu5

  • 1School of Instrument and Electronics, North University of China, Taiyuan 030051, China.

Micromachines
|October 26, 2024
PubMed

Keywords:
RF MEMSbroadbandreconfigurable step attenuatorthin film resistor

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