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Control of a Micro-Electro-Mechanical System Fast Steering Mirror with an Input Shaping Algorithm.

Jiapeng Hou1,2, Haoxiang Li1,2, Lei Qian1,2

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This study presents a novel control algorithm for micro-electro-mechanical system (MEMS) fast steering mirrors (FSMs). The algorithm significantly reduces overshoot and settling time, enhancing FSM stability and bandwidth for faster angular adjustments.

Keywords:
fast steering mirror (FSM)input shapingmicro-electro-mechanical system (MEMS)overshoot suppression

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Area of Science:

  • Engineering
  • Materials Science
  • Control Systems

Background:

  • Micro-electro-mechanical systems (MEMS) offer advantages in size and mass for devices like fast steering mirrors (FSMs).
  • Improving the performance of MEMS-FSMs in open-loop control is crucial for applications requiring precise and rapid angular adjustments.

Purpose of the Study:

  • To introduce and evaluate a new control algorithm for electromagnetic-driven MEMS-FSMs operating in open-loop mode.
  • To enhance the stability, speed, and working bandwidth of MEMS-FSMs through signal shaping.

Main Methods:

  • Developed a control algorithm that shapes the input signal by fitting the system's transfer function.
  • Modified the system's step response to minimize overshoot and reduce settling time.
  • Implemented and tested the algorithm on an electromagnetic-driven MEMS-FSM.

Main Results:

  • Achieved an 85.65% reduction in signal overshoot.
  • Decreased the settling time from 84 ms to 0.4 ms.
  • Increased the working bandwidth of the MEMS-FSM system to 2500 Hz.

Conclusions:

  • The proposed control algorithm effectively enhances the performance of MEMS-FSMs.
  • The algorithm enables faster angular adjustments and improved stability, making MEMS-FSMs more suitable for demanding applications.
  • Significant improvements in overshoot, settling time, and bandwidth were experimentally validated.