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Image-Based Auto-Focus Microscope System with Visual Servo Control for Micro-Stereolithography.

Yijie Liu1,2,3,4,5, Xuexuan Li3,4, Pengfei Jiang1,2,5

  • 1Coal Mining Research Institute, China Coal Technology and Engineering Group Co., Ltd., Beijing 100013, China.

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|October 26, 2024
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Summary
This summary is machine-generated.

This study introduces an advanced auto-focus microscope system for micro-stereolithography (μSL). The system uses visual servo control and deep learning to precisely maintain laser focus, improving microstructure fabrication accuracy.

Keywords:
auto-focusdeep learninglasermachine visionmicro-stereolithographyvisual servo control

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Area of Science:

  • Additive Manufacturing
  • Microfabrication
  • Optical Metrology

Background:

  • Micro-stereolithography (μSL) requires precise focus for high-resolution microstructure fabrication.
  • Maintaining sample surface focus within microns is critical for μSL success.
  • Existing auto-focus systems lack sufficient attention for precision μSL applications.

Purpose of the Study:

  • To develop an image-based auto-focus microscope system for precision micro-stereolithography.
  • To integrate visual servo control with a deep learning algorithm for accurate focusing.
  • To address the challenge of maintaining focus in μSL processes.

Main Methods:

  • An optical design utilizing a transflective beam splitter to direct the laser and reflected spot image.
  • A deep learning-based algorithm processing laser spot images (spot size, pixel count) for focus determination.
  • Implementation of visual servo control for automated focusing adjustments.

Main Results:

  • The proposed system effectively determines the focal point's relative position using laser spot images.
  • Experimental results confirm the system's capability for auto-focusing in μSL.
  • The developed algorithm accurately utilizes spot characteristics for focus assessment.

Conclusions:

  • The image-based auto-focus microscope system with visual servo control is effective for precision μSL.
  • Deep learning-based spot image analysis enables accurate focus detection.
  • This technology enhances the reliability and precision of micro-stereolithography fabrication.