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Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and
Panliang Tang1,2, Hongzhi Pan2, Temesgen Bailie Workie1
1School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, No. 2006, Xiyuan Avenu, West Hi-Tech Zone, Chengdu 611731, China.
Micromachines
|October 26, 2024
Summary
This study introduces a novel honeycomb phononic crystal (PnC) structure for surface acoustic wave (SAW) devices. The PnC reflector enhances resonator performance and enables device miniaturization.
Area of Science:
- Materials Science and Engineering
- Acoustics and Wave Phenomena
- Nanotechnology
Background:
- Surface Acoustic Wave (SAW) devices benefit from high Q values offered by multi-layered piezoelectric substrates.
- Phononic crystal (PnC) structures integrated with multi-layer substrates can achieve miniaturization and high performance in SAW devices.
- Acoustic wave reflection is crucial for SAW device functionality.
Purpose of the Study:
- To propose and analyze a novel honeycomb-shaped phononic crystal (HC-PnC) structure for SAW devices.
- To investigate the impact of HC-PnC structures on bandgap distribution and resonator performance.
- To demonstrate the potential for device miniaturization and performance enhancement using HC-PnC reflectors.
Main Methods:
- Dispersion and transmission characteristic analysis to determine bandgap distribution.
- Fabrication and characterization of a 42°Y-X LT/SiO2/poly-Si/Si-layered substrate with HC-PnC.
- Comparison and analysis of one-port SAW resonators with different reflector types.
- Evaluation of frequency response and Bode-Q values.
Main Results:
- The HC-PnC structure exhibits tunable bandgap properties based on filling fractions.
- Integration of HC-PnC as a reflector significantly improves the transmission loss of SAW resonators.
- The use of HC-PnC reflectors leads to a substantial reduction in device size.
- Enhanced Q values were observed with the HC-PnC reflector.
Conclusions:
- The proposed HC-PnC structure is effective for enhancing SAW device performance.
- HC-PnC reflectors offer a viable solution for miniaturizing high-performance SAW devices.
- This approach paves the way for advanced acoustic wave devices with improved efficiency and reduced footprint.
