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Updated: Jun 9, 2025

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid

Published on: December 2, 2022

Controlling strain localization in thin films with nanoindenter tip sharpness.

Stanislav Zak¹

¹Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, 8700, Leoben, Austria. stanislav.zak@oeaw.ac.at.

Scientific Reports

|October 27, 2024

Summary

This summary is machine-generated.

The tip radius significantly impacts thin film mechanical property measurements. Understanding this parameter is crucial for accurate elastic modulus determination in nanoindentation experiments.

Keywords:

Finite element modelling Nanoindentation Strain localization Thin film Thin multilayer

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Area of Science:

Materials Science
Mechanical Engineering
Nanotechnology

Background:

Thin film mechanical property measurement is vital for diverse applications.
Substrate influence complicates accurate elastic modulus determination.
Existing methods lack comprehensive analysis of influencing parameters.

Purpose of the Study:

To quantify the effect of tip radius on strain fields during nanoindentation.
To investigate parameters enhancing thin film mechanical property measurement accuracy.
To highlight the importance of tip radius in nanoindentation analysis.

Main Methods:

Utilized three Berkovich indentation tips with varying radii.
Performed thin multilayer nanoindentation experiments.
Employed numerical modeling for simulation and analysis.

Main Results:

Confirmed a large elastically deformed zone with strain localization under the indenter.
Demonstrated a direct correlation between tip radius and strain localization.
Showcased how tip radius influences experimental outcomes.

Conclusions:

Tip radius is a critical parameter influencing strain localization in nanoindentation.
Accurate knowledge of tip radius is essential for reliable thin film elastic modulus measurement.
This study emphasizes the need to consider tip radius for improved nanoindentation insights.