Triflate Salts as Alternative Non-Chlorinated Oxidants for the Oxidative Chemical Vapor Deposition and Electronic

Drialys Cardenas-Morcoso1, Justine Debard1, Faezeh Farzin1

  • 1Material Research and Technology Department, Luxembourg Institute of Science and Technology, 28 Avenue des Hauts-Fourneaux, 4362 Esch-sur-Alzette, Luxembourg.

Macromolecules
|October 28, 2024
PubMed