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Updated: Jun 9, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Correlative X-ray micro-nanotomography with scanning electron microscopy at the Advanced Light Source
Arun J Bhattacharjee1, Harrison P Lisabeth1, Dilworth Parkinson2
1Energy Geosciences Division, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd, Berkeley, CA 94720, USA.
This study introduces a multiscale imaging method combining X-ray tomography and SEM-EDS for geological samples. It reveals complex 3D microstructures and highlights the necessity of multiscale analysis for accurate rock characterization.
Area of Science:
- Geosciences
- Materials Science
- Analytical Chemistry
Background:
- Geological samples exhibit properties across multiple scales, necessitating nano-scale characterization for a complete understanding.
- X-ray tomography provides 3D microstructural information but lacks chemical details.
- Scanning Electron Microscopy with Energy-Dispersive Spectroscopy (SEM-EDS) offers chemical analysis but typically at lower resolution or in 2D.
Purpose of the Study:
- To develop and validate a correlative methodology for measuring multi-scale 3D microstructure and chemistry in geological samples.
- To integrate X-ray micro- and nanotomography with SEM-EDS for comprehensive sample characterization.
- To demonstrate the application of this protocol on serpentine and basalt rock samples.
Main Methods:
- Performed micro X-ray tomography on rock cores.
- Utilized laser milling for sub-sample preparation for nanotomography.
- Conducted nanotomography, followed by SEM-EDS imaging and compositional mapping on prepared samples.
Main Results:
- Revealed multiscale 3D structures, including mineral phases and pore networks, in serpentine and basalt.
- Observed significant variations in pore and mineral phase volume fractions based on imaging resolution.
- Leveraged SEM-EDS chemical mapping to aid in segmenting phases with low contrast in X-ray imaging.
Conclusions:
- A correlative multiscale approach is essential for accurately characterizing complex geological aggregates like rocks.
- The integrated methodology provides complementary microstructural and chemical information.
- This protocol is broadly applicable to 3D imaging studies at user facilities.
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