Site-controlled growth of In(Ga)As/GaAs quantum dots on patterned substrate

Xiaoyang Zhao1,2, Wen Liu1,2,3, Yidi Bao1,2

  • 1Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, People's Republic of China.

Nanotechnology
|October 31, 2024
PubMed
Summary

Researchers developed site-controlled Indium Gallium Arsenide (In(Ga)As) quantum dot (QD) arrays for advanced applications. Precise control over QD size, location, and optical quality was achieved using patterned substrates and optimized deoxidation treatments.