Fabrication and electroadhesion properties of parylene-coated carbon fiber arrays

Parylene-coated carbon fiber (CF) arrays with tunable inclination angles and heights were fabricated using oxygen plasma etching of composite wafers with embedded parallel CFs, followed by parylene coating via chemical vapor deposition. The effective elastic modulus of the CF arrays was found to decrease approximately in proportion to the square of the fiber length (5-60μm), with the parylene coating (∼2μm) further slightly reducing the modulus. Both experimental measurements and finite element simulations indicated that CF arrays with inclination angles below 75° exhibit ideal contact with glass wafers during electrostatic adhesion. However, the measured electrostatic adhesion between CF arrays and A4 paper was significantly lower than the predicted value for ideal contact, likely due to the porous nature of the paper. Electrostatic chuck prototypes based on the parylene-coated CF arrays demonstrated effective pick-and-place capabilities for A4 paper, plastic films, and glass wafers at voltages ranging from 500 to 900 V, without causing surface damage or leaving residue. These results highlight the potential of the parylene-coated CF arrays for applications in high-precision manufacturing and automated handling systems.