Application of Graphene in Acoustoelectronics

An interdigital transducer structure was fabricated from multilayer graphene on the surface of the YZ-cut of a LiNbO₃ ferroelectric crystal. The multilayer graphene was prepared by CVD method and transferred onto the surface of the LiNbO₃ substrate. The properties of the multilayer graphene film were studied by Raman spectroscopy. A multilayer graphene (MLG) interdigital transducer (IDT) structure for surface acoustic wave (SAW) excitation with a wavelength of Λ=60 μm was fabricated on the surface of the LiNbO₃ crystal using electron beam lithography (EBL) and plasma chemical etching. The amplitude-frequency response of the SAW delay time line was measured. The process of SAW excitation by graphene IDT was visualized by scanning electron microscopy. It was demonstrated that the increase in the SAW velocity using graphene was related to the minimization of the IDT mass.