What could be the low-temperature limit of atomic layer deposition of platinum using MeCpPtMe3 and oxygen?

Hao Van Bui1, Anh Phan Nguyen1, Manh Duc Dang1

  • 1Faculty of Materials Science and Engineering, Phenikaa University, Yen Nghia, Ha Dong District, Hanoi 12116, Vietnam. hao.buivan@phenikaa-uni.edu.vn.

Chemical Communications (Cambridge, England)
|November 11, 2024
PubMed

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