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Updated: Jun 7, 2025

Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates
Published on: March 20, 2015
Nanorod structure tuning and defect engineering of MoO for high-performance SERS substrates
Trong Vo Huu1,2, Hong Le Thi Thu1,2, Long Nguyen Hoang1,2
1Faculty of Physics and Engineering Physics, University of Science, Ho Chi Minh City 700000, Vietnam. vhtrong.ntb@hcm.edu.vn.
This study developed novel plasmon-free SERS substrates using molybdenum oxide nanostructures. These substrates demonstrate high sensitivity for detecting low concentrations of R6G, showing potential for advanced sensing applications.
Area of Science:
- Materials Science
- Nanotechnology
- Spectroscopy
Background:
- Surface-enhanced Raman scattering (SERS) is gaining interest for plasmon-free substrates based on metal oxide semiconductors.
- These substrates utilize semiconductor defects, structure, and morphology for Raman signal enhancement, avoiding noble metal nanoparticles.
- Molybdenum oxide (MoO₂) is explored as a promising material for fabricating efficient SERS substrates.
Purpose of the Study:
- To fabricate and optimize molybdenum oxide-based SERS substrates using reactive DC magnetron sputtering.
- To investigate strategies for enhancing Raman signal amplification through controlled material properties.
- To evaluate the substrate's performance in detecting low concentrations of target molecules.
Main Methods:
- Fabrication of MoO₂ SERS substrates via reactive DC magnetron sputtering.
- Control of nanorod structure, oxygen deficiency, phase composition, and optical properties by adjusting sputtering and annealing times.
- Characterization using X-ray Diffraction (XRD), Photoluminescence (PL), and Raman spectroscopy.
Main Results:
- Optimized fabrication conditions yielded MoO₂ SERS substrates with controllable nanorod structures, oxygen defects, and mixed MoO₃/Mo₉O₂₆ phases.
- Enhanced Raman signals were attributed to a combination of chemical (CM) and electromagnetic (EM) mechanisms.
- The MoO₂ substrates achieved a high enhancement factor (EF) of 1.14 × 10⁶ for R6G detection at 0.01 ppm, with a limit of detection (LOD) of 0.01 ppm.
Conclusions:
- Tailoring sputtering and annealing parameters allows precise control over MoO₂ nanostructure and defect engineering for SERS applications.
- The developed MoO₂ SERS substrates exhibit excellent sensitivity, reproducibility, and temporal stability for trace molecule detection.
- Plasmon-free MoO₂ nanostructures offer a viable and efficient platform for advanced chemical sensing.
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