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Updated: Jun 7, 2025

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Ilya A Morozov1, Anton Yu Beliaev1, Alexander S Kamenetskikh2
1Institute of Continuous Media Mechanics UB RAS, Perm, Russia.
This study analyzes indentation data for stiff layers on elastic substrates using finite element methods. The findings help determine mechanical properties and fracture toughness of thin films.
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