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    Multilateral shearing interferometers (multi-LSIs) can produce inaccurate results due to fringe contrast reversal. This study introduces a quantitative analysis and theoretical model to eliminate modulation effects, improving measurement accuracy.

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    Area of Science:

    • Optical metrology
    • Interferometry

    Background:

    • Multilateral shearing interferometers (multi-LSIs) offer high accuracy and noise resistance.
    • Contrast modulation in multi-LSIs can cause fringe contrast reversal, leading to measurement errors.

    Purpose of the Study:

    • To provide a quantitative analysis of contrast modulation in multi-LSIs.
    • To establish a theoretical model for aberration measurement range and shear ratio.
    • To offer practical guidance for eliminating modulation effects and enhancing measurement precision.

    Main Methods:

    • Rigorous derivation of the contrast modulation function.
    • Analysis of aberration and shear ratio effects on contrast modulation.
    • Development of a quantitative theoretical model.

    Main Results:

    • A quantitative theoretical model linking aberration measurement range and shear ratio was established.
    • The study identified the distribution of fringe contrast reversal bands.
    • Simulation and experimental results validated the theoretical analysis.

    Conclusions:

    • The proposed quantitative analysis and theoretical model effectively address fringe contrast inversion in multi-LSIs.
    • This approach provides a theoretical basis and practical guidance for precise shear ratio adjustment.
    • Eliminating modulation effects maximizes the benefits of multi-LSIs for accurate phase difference measurements.