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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Christian Greff1,2, Paolo Moretti3,4, Michael Zaiser1,2
1Department of Materials Science, WW8-Materials Simulation, FAU Universität Erlangen-Nürnberg, Dr.-Mack-Straße 77, 90762, Fürth, Germany.
Architected thin films with hierarchical microstructures prevent interface failure by confining cracks. This design offers robust fracture strength without compromising performance, unlike isotropic materials.
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