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Highly Productive Laser Annealing Manufacturing Method Using Continuous Blue WBC (Wavelength Beam Combining)
Mitsuoki Hishida1, Naohiko Kobata1, Kentaro Miyano1
1Panasonic Connect Co., Ltd., 3-1-1 Inazu-cho, Toyonaka City 561-0854, Osaka, Japan.
Materials (Basel, Switzerland)
|November 27, 2024
Summary
This study introduces a novel blue laser annealing method for high-mobility thin-film transistors (TFTs), significantly boosting productivity. The new continuous wave laser process achieves double the output of conventional methods, reducing costs and improving efficiency.
Area of Science:
- Materials Science
- Semiconductor Physics
- Laser Technology
Background:
- Low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs) require efficient laser annealing.
- Current blue laser annealing methods face challenges with low productivity and high costs.
- Pulsed excimer lasers are conventional but less efficient for high-power blue laser annealing.
Purpose of the Study:
- To develop a high-productivity blue laser annealing process for TFTs.
- To improve the efficiency of blue laser energy delivery in LTPS fabrication.
- To overcome the limitations of conventional pulsed lasers in semiconductor manufacturing.
Main Methods:
- Developed a blue laser light source (440 ± 10 nm) using wavelength beam combining (WBC).
- Utilized a continuous wave laser instead of a pulsed excimer laser.
- Achieved a laser power density of 73.7 kW/cm² with the developed system.
Main Results:
- Increased laser scanning speed by 5.0 times with a 2.9 times power increase.
- Achieved twice the productivity compared to conventional laser annealing methods.
- Obtained 100% crystallization rate with crystal grains of 2–15 μm and low resistivity (0.04 Ωcm).
Conclusions:
- The developed blue laser annealing process significantly enhances TFT production capacity.
- Continuous wave blue laser technology offers a geometric progression in production efficiency.
- This advancement addresses cost and productivity issues in LTPS TFT fabrication.
