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Updated: Jun 6, 2025

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

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Published on: March 7, 2018

Single-layer MoS₂/graphene-based stable on-chip Zn-ion microbattery for monolithically integrated electronics.

Jipeng Chen¹, Wenbo Zhao¹, Yong Gao¹

¹Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an 710072, China; Key Laboratory of Flexible Electronics of Zhejiang Province, Ningbo Institute of Northwestern Polytechnical University, Ningbo 315103, China.

Science Bulletin

|November 27, 2024

Summary

Researchers developed a single-layer MoS2/graphene heterostructure for stable zinc-ion microbatteries. This innovation enables dendrite-free zinc deposition, paving the way for integrated self-powered microelectronics.

Keywords:

Dendrite-free Heterostructure Self-powered integrated electronics Single-layer MoS(2)Zn-ion microbattery

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Published on: August 28, 2018

Area of Science:

Materials Science
Energy Storage
Microelectronics Engineering

Background:

Self-powered microelectronics require integrated microenergy supplies for autonomous operation.
Existing microenergy solutions face challenges in stability and integration.
Zinc-ion microbatteries offer potential but require advanced electrode materials.

Purpose of the Study:

To develop a novel heterostructure for stable and efficient zinc-ion microbatteries.
To investigate the suitability of MoS2/graphene for reversible zinc deposition.
To demonstrate the integration of these microbatteries with other microelectronic components.

Main Methods:

Fabrication of a single-layer MoS2/graphene heterostructure.
Electrochemical testing of Zn||MnO2 microbatteries utilizing the heterostructure.
Characterization of zinc deposition and stripping behavior.
On-chip fabrication of integrated microbatteries and transistors using lithography.

Main Results:

The MoS2/graphene heterostructure enabled stable, dendrite-free epitaxial zinc deposition and stripping.
The Zn||MnO2 microbattery achieved a capacity of 0.16 mAh cm-2 at 0.5 mA cm-2 over 470 cycles.
Simultaneous fabrication of microbatteries and field-effect transistors on a single crystalline MoS2/graphene film was demonstrated.

Conclusions:

The single-layer MoS2/graphene heterostructure is a promising material for stable micro-energy storage.
This work enables the development of highly integrated, self-powered microsystems.
The findings pave the way for multi-functionalization and miniaturization of next-generation electronics.