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Updated: Jun 6, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Xiaoyuan Liu1,2, Zihan Geng3, Mu Ku Chen4,5
1The State Key Laboratory of Terahertz and Millimeter Waves, City University of Hong Kong, Kowloon, Hong Kong, 999077, China.
A novel meta-lens array Shack-Hartmann sensor overcomes traditional limitations, enhancing phase measurement accuracy. This metasurface technology enables more detailed characterization of complex wavefronts at smaller scales.
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