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Updated: Jun 5, 2025

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Fast-speed and low-power-consumption optical phased array based on lithium niobate waveguides
Zhizhang Wang1, Xueyun Li1, Jitao Ji1
1National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulation, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China.
Nanophotonics (Berlin, Germany)
|December 5, 2024
Summary
Integrated optical phased arrays (OPAs) on thin-film lithium niobate-on-insulator (LNOI) achieve fast scanning and low power consumption. This LNOI platform demonstrates scalability for high-performance chiplet OPAs.
Area of Science:
- Photonics
- Materials Science
- Electrical Engineering
Background:
- High-performance chiplet optical phased arrays (OPAs) require fast scanning speeds and low power consumption.
- The thin-film lithium niobate-on-insulator (LNOI) platform offers potential for advanced photonic integrated circuits.
Purpose of the Study:
- To demonstrate integrated OPAs with multiple waveguide channels using the LNOI platform.
- To evaluate the performance of LNOI-based OPAs in terms of speed, power consumption, and beam steering capabilities.
Main Methods:
- Fabrication of LNOI OPA chips with 32 and 48 channels.
- Utilizing electro-optic modulations for waveguide control.
- Experimental characterization of field of view (FOV) and beam divergence.
Main Results:
- Demonstrated LNOI OPA chips with 32 and 48 channels.
- Achieved low power consumption (1.11 nJ/π) and fast operation speed (14.4 ns).
- Obtained significant beam steering with wide fields of view (e.g., 62.2° × 8.8° for 32 channels) and low beam divergence (e.g., 0.33° × 1.8° for 48 channels).
Conclusions:
- The LNOI platform is advantageous for realizing high-performance, low-power, and fast-scanning OPAs.
- The study confirms the feasibility of the LNOI platform for scalable OPA chip development.
- LNOI-based OPAs show significant potential for various photonic applications.

