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Updated: Aug 6, 2026

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Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
Published on: July 2, 2012
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Multilayer all-polymer metasurface stacked on optical fiber via sequential micro-punching process
Moohyuk Kim1, Nu-Ri Park1, Aran Yu1
1KU-KIST Graduate School of Converging Science and Technology, Korea University, Seoul, 02841 Republic of Korea.
Nanophotonics (Berlin, Germany)
|December 5, 2024
Summary
A new micro-punching technique precisely stacks polymer metasurfaces onto optical fibers. This breakthrough enables efficient fiber-coupled metalenses and orbital angular momentum (OAM) generation for advanced optical applications.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- Metasurface technology offers advanced optical functionalities.
- Integrating metasurfaces with optical fibers is challenging due to small fiber facet areas.
- Existing fabrication methods struggle with precision and efficiency for fiber-based metasurfaces.
Purpose of the Study:
- To develop a novel fabrication process for stacking multiple polymer metasurfaces onto single-mode optical fibers.
- To demonstrate the efficacy of this process for creating functional metasurface-on-fiber devices.
- To overcome the limitations of small fiber facet areas in metasurface integration.
Main Methods:
- Sequential micro-punching process for stacking metasurfaces.
- E-beam lithography to fabricate mesh-type nanohole metasurfaces on polymethyl methacrylate (PMMA) membranes.
- Integration of fabricated metasurfaces onto the end face of a single-mode optical fiber.
Main Results:
- Demonstrated rapid and precise stacking of multiple polymer metasurfaces on optical fibers.
- Achieved highly efficient all-polymer metalenses with 83% efficiency for a 1550 nm laser.
- Successfully generated perfect vortex beams with topological charge 3 using orbital angular momentum (OAM) metasurfaces.
Conclusions:
- The proposed micro-punching process is a breakthrough for fabricating metasurface-integrated optical fibers.
- This technique enables efficient coupling of advanced optical functions to optical fibers.
- The developed metasurface-on-fiber platforms have potential for diverse applications in telecommunications and beyond.

