Rotational varifocal moiré metalens made of single-crystal silicon meta-atoms for visible wavelengths

Metasurface lenses (metalenses) offer an ultrathin and simple optical system with dynamic functions that include focal length tuning. In this study, a rotational varifocal (i.e., moiré) metalens based on octagonal single-crystal silicon pillars was designed and fabricated to realize a high transmittance, whole 2π phase coverage, and polarization insensitivity for visible wavelengths. The moiré metalens consists of a pair of cascaded metasurface-based phase lattices and the focal length can be adjusted from negative to positive by mutual rotation. The fabricated moiré metalens demonstrated a focal length that can be tuned from -36 mm to -2 mm and from 2 to 12 mm by mutual rotation from -90° to 90°, and the experimental measurements agreed well with theoretical values at the design wavelength of 633 nm. Imaging was demonstrated at three distinct wavelengths of 633, 532, and 440 nm.