Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters

Area of Science:

• Quantum photonics
• Materials science
• Nanofabrication

Background:

• Diamond color centers are crucial for quantum technologies.
• Refractive index mismatch limits light collection efficiency in conventional diamond devices.
• Advanced nanofabrication is needed for efficient light extraction.

Purpose of the Study:

• To develop a nanofabrication method for enhancing light collection from diamond quantum emitters.
• To demonstrate real-time monitoring of quantum emitters during fabrication.
• To enable precise control over emitter-cavity interactions in integrated quantum photonics.

Main Methods:

• Utilized electron-beam-induced etching to modify tin-implanted diamond quantum microchiplets with integrated waveguides.
• Employed high-resolution imaging and direct writing for nanoscale modification.
• Integrated operando cathodoluminescence measurements with fabrication for real-time feedback.

Main Results:

• Successfully modified diamond microchiplets with integrated waveguides (280nm width, 200nm thickness).
• Achieved simultaneous high-resolution imaging and host matrix modification.
• Demonstrated real-time monitoring of quantum emitter enhancement via cathodoluminescence.

Conclusions:

• Electron-beam-induced etching is a viable technique for fabricating diamond quantum photonic devices.
• Operando cathodoluminescence provides nanoscale spatial resolution for monitoring quantum emitters.
• This approach lays the groundwork for controlling emitter-cavity interactions in integrated quantum systems.