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An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation
Yi Xu1, Baowei Gao2, Axin He1
1State Key Laboratory for Artificial Microstructures and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China.
Nanophotonics (Berlin, Germany)
|December 5, 2024
Summary
This study introduces an optical displacement sensor for nanodevices. It achieves angstrom-level resolution and a large measurement range using wavelength modulation and surface plasmon polaritons.
Area of Science:
- Nanotechnology
- Optical Metrology
- Plasmonics
Background:
- Optical displacement metrology is crucial for nanodevice positioning.
- Existing sensors lack ultracompact size, angstrom-scale resolution, and large measurement range.
Purpose of the Study:
- To propose a novel optical displacement sensor.
- To achieve subwavelength footprint, angstrom-level resolution, and a large measurement range.
Main Methods:
- Utilized two optical slot antennas to launch surface plasmon polaritons (SPPs).
- Employed wavelength modulation and SPP interference for displacement sensing.
- Used interference fringe of broadband beams to extend measurement range.
Main Results:
- Achieved a maximum resolution of 0.734 nm.
- Demonstrated angstrom-level resolution with a large measurement range.
- Overcame the resolution-range trade-off using a novel wavelength modulation mechanism.
Conclusions:
- The proposed sensor offers a unique solution for nanometrology.
- Potential applications in advanced nanotechnology and device characterization.
- Enables precise measurement of nanodevice positions and displacements.
