Generating Electromagnetic Radiations
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
M Vu1,2, M Lewandowski3, X Guo2
1Photon Science Institute, University of Manchester, Oxford Road, Manchester M13 9PL, United Kingdom.
This study introduces a versatile, multi-channel high-voltage source system for controlling and monitoring electrostatic actuators. The setup simultaneously generates arbitrary waveforms, senses voltage/current, and captures high-speed video for detailed characterization.
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