A PDMS-Al Triboelectric Nanogenerator Using Two-Pulse Laser to Enhance Effective Contact Area and Its Application

A triboelectric nanogenerator (TENG) is a kind of energy harvester which converts mechanical energy into electrical energy with electron transfer and transport between two different materials during cycling tribology. To increase the contact area between tribo-layers and enhance the output of TENGs, many studies prepare patterned micro/nanostructured tribo-layers using semiconductor processes like lithography and etching at high cost and with long processing times. Here, we propose a new method to quickly produce high-aspect-ratio (HAR) microneedles of polydimethylsiloxane (PDMS) for TENG triboelectric layers using a two-pulse laser-ablated polymethyl methacrylate mold and casting. It has the merit of employing low-cost CO₂ laser microfabrication and polymer casting in a feasible way to produce efficient tribo-electric layers. Two-pulse laser ablation is an efficient method for fabricating HAR microstructures with increasing depth at a constant width and density compared to single-pulse ablation. It enhances the depth of microneedles at a constant width and successfully casts PDMS tribo-layers with microneedles that have an aspect ratio 1.88 times higher than those produced by the traditional single-pulse process. The microneedle-PDMS (MN-PDMS) layer is combined with Al sheets to form the MN-PDMS-Al TENG. Compared with the flat PDMS-Al TENG and single-pulse PDMS-Al TENG, the two-pulse TENG enhances open-circuit voltage (V_oc) by 1.63 and 1.48 times, the short-circuit current (I_sc) by 1.92 and 1.47 times, and the output power by 3.69 and 2.16 times, respectively. This two-pulse ablation method promotes the output performance of TENGs, which has the potential for applications in self-powered devices and sustainable energy.