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Updated: Jul 27, 2026

Fabricating van der Waals Heterostructures with Precise Rotational Alignment
Published on: July 5, 2019
Nano-spherical tip-based smoothing with minimal damage for 2D van der Waals heterostructures
Xiaolei Ding1,2, Boshi Qiao1, Paul C Uzoma1
1ZJUI Institute, International Campus, Zhejiang University, Haining, 314400 China. huanhu@intl.zju.edu.cn.
Nano-spherical probes offer superior, low-damage cleaning for two-dimensional (2D) materials like MoS2/hBN. This advanced atomic force microscopy (AFM) method significantly improves material quality and optoelectronic performance by minimizing contamination and structural damage.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
- Optoelectronics
Background:
- Two-dimensional (2D) materials and heterostructures possess unique properties crucial for advanced materials science and optoelectronics.
- Fabrication and transfer processes introduce impurities, degrading the intrinsic quality of 2D materials.
- Current atomic force microscopy (AFM) probe contact modes offer in situ cleaning but pyramidal probes risk surface damage.
Purpose of the Study:
- To introduce and evaluate a nano-spherical probe contact mode for minimum-damage cleaning of residual and polymer contamination on 2D materials.
- To compare the cleaning efficacy and impact on material properties of nano-spherical probes against traditional pyramidal probes.
Main Methods:
- Utilized atomic force microscopy (AFM) in contact mode with both nano-spherical and pyramidal probes for cleaning MoS2/hBN substrates.
- Performed comparative analyses of material morphology and photoluminescence (PL) properties before and after cleaning.
- Employed Kelvin probe force microscopy (KPFM) and scanning electron microscopy (SEM) to assess surface potential uniformity and morphology.
Main Results:
- Nano-spherical probes effectively removed bubbles and reduced PL FWHM by 30% (from 0.115 eV to 0.08 eV), indicating improved material quality.
- Pyramidal probes showed limited cleaning efficacy, especially on larger bubbles, resulting in less uniform PL mapping data.
- Nano-spherical probes maintained surface integrity and potential uniformity (KPFM, SEM), unlike pyramidal probes which caused damage at higher forces.
Conclusions:
- Nano-spherical probes provide a significantly more effective and lower-damage cleaning method for 2D materials compared to pyramidal probes.
- This technique minimizes contamination and preserves the intrinsic properties of 2D materials, crucial for their application in optoelectronics.
- The nano-spherical probe method represents a promising advancement for high-quality fabrication and application of 2D materials.
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