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12-Spin-Qubit Arrays Fabricated on a 300 mm Semiconductor Manufacturing Line.

Hubert C George1, Mateusz T Mądzik1, Eric M Henry1

  • 1Intel Corporation, Technology Research Group, Hillsboro, Oregon 97124, United States.

Nano Letters
|December 25, 2024
PubMed
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Intel demonstrates a new quantum test chip using advanced semiconductor manufacturing. This scalable spin-qubit platform is a key step toward building practical quantum computers.

Area of Science:

  • Quantum Computing
  • Semiconductor Manufacturing
  • Quantum Devices

Background:

  • Developing practical quantum computers requires scalable qubit platforms.
  • Intel leverages high-volume semiconductor manufacturing for quantum technology.

Purpose of the Study:

  • To present the design, fabrication, and demonstration of a novel quantum test chip.
  • To showcase a 12-quantum-dot spin-qubit linear array for quantum computing.

Main Methods:

  • Fabrication using immersion and extreme ultraviolet lithography (EUV).
  • Utilizing standard high-volume manufacturing (HVM) processes and production-level control.
  • Design and characterization of the 'Tunnel Falls' quantum test chip.

Main Results:

Keywords:
industrialmanufacturingquantum dotsqubitssiliconsilicon germanium

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  • Successful fabrication of a 12-qubit linear array chip.
  • Qubit characterization confirms device functionality.
  • Demonstration of fabrication methods suitable for scaling.

Conclusions:

  • Intel's fabrication methods are validated for scalable quantum computing.
  • The developed spin-qubit platform is a significant advancement.
  • This work paves the way for extensible 2D qubit array schemes.