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Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures
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Laser-Induced Phase Control of Morphotropic Phase Boundary Hafnium-Zirconium Oxide

Seung-Mo Kim1, Minjae Kim1, Chan Bin Lee1

  • 1Center for Semiconductor Technology Convergence, Department of Electrical Engineering, Pohang University of Science and Technology, Cheongam-ro 77, Nam-gu, Pohang, Gyeongbuk 37673, South Korea.

ACS Applied Materials & Interfaces
|January 2, 2025
PubMed

Keywords:
HZOMFM capacitorcontinuous-wave laser scanning annealinghigh-κ materialsmorphotropic phase boundary

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